Electrochemical Studies of Carbon Films from Pyrolyzed Photoresist

Abstract

Carbon film electrodes were prepared by pyrolysis of photoresists on silicon wafers at temperatures ranging from 600 to 1100°C. The physical properties of the carbon films were characterized by scanning and transmission electron microscopies, thermal gravimetric analysis, and four‐point probe electrical resistivity measurements. The electrochemical properties of the carbon films were investigated by cyclic voltammetry to observe the kinetics of the redox couple. The carbon film electrodes prepared at temperatures ⩾700°C showed electrochemical behavior similar to that of glassy carbon. Better electrocatalytic behavior was obtained with carbon films prepared at the higher pyrolysis temperatures, which is attributed to different film compositions at different pyrolysis temperatures. The electrochemical properties of the carbon film electrodes are very stable, exhibiting reproducible behavior even after storing at room temperature in air for 3 months.